Design and fabrication of piezoelectric MEMS

Natalya Korobova; Venyamin Vodopyanov; Sergey Timoshenkov

doi:10.1117/12.2016968

8 January 2013 Design and fabrication of piezoelectric MEMS

Natalya Korobova, Venyamin Vodopyanov, Sergey Timoshenkov

Proceedings Volume 8700, International Conference Micro- and Nano-Electronics 2012; 87000R (2013) https://doi.org/10.1117/12.2016968
Event: International Conference on Micro-and Nano-Electronics 2012, 2012, Zvenlgorod, Russian Federation

Abstract

Lead-zirconate-titanate (PZT) is a typical piezoelectric material with outstanding properties. The preparation behavior of Lead Zirconate Titanate (PZT) composite films comprised of Si, SiO₂, Pt, PZT and Pt for MEMS applications was investigated. The choice of precursors can affect the microstructures and properties of the product, so in this paper we compared the crystallization behavior of PZT films derived from different precursors, stressing the influence of experiment conditions. Dense PZT films were prepared by electrophoretic deposition method (EPD), using commercial powder PZT precursor and metal alkoxide components for the same composition. Some specific comments were underlined about structure of PZT films.

Citation Download Citation

Natalya Korobova, Venyamin Vodopyanov, and Sergey Timoshenkov "Design and fabrication of piezoelectric MEMS", Proc. SPIE 8700, International Conference Micro- and Nano-Electronics 2012, 87000R (8 January 2013); https://doi.org/10.1117/12.2016968

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