MEMS tactile display: from fabrication to characterization

Norihisa Miki; Yumi Kosemura; Junpei Watanabe; Hiroaki Ishikawa

doi:10.1117/12.2044127

7 March 2014 MEMS tactile display: from fabrication to characterization

Norihisa Miki, Yumi Kosemura, Junpei Watanabe, Hiroaki Ishikawa

Proceedings Volume 8975, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII; 897506 (2014) https://doi.org/10.1117/12.2044127
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

We report fabrication and characterization of MEMS-based tactile display that can display users various tactile information, such as Braille codes and surface textures. The display consists of 9 micro-actuators that are equipped with hydraulic displacement amplification mechanism (HDAM) to achieve large enough displacement to stimulate the human tactile receptors. HDAM encapsulates incompressible liquids. We developed a liquid encapsulation process, which we termed as Bonding-in-Liquid Technique, where bonding with a UV-curable resin in glycerin is conducted in the liquid, which prevented interfusion of air bubbles and deformation of the membrane during the bonding. HDAM successfully amplified the displacement generated by piezoelectric actuators by a factor of 6. The display could virtually produce “rough” and “smooth” surfaces, by controlling the vibration frequency, displacement, and the actuation periods of an actuator until the adjacent actuator was driven. We introduced a sample comparison method to characterize the surfaces, which involves human tactile sensation. First, we prepared samples whose mechanical properties are known. We displayed a surface texture to the user by controlling the parameters and then, the user selects a sample that has the most similar surface texture. By doing so, we can correlate the parameters with the mechanical properties of the sample as well as find the sets of the parameters that can provide similar tactile information to many users. The preliminary results with respect to roughness and hardness is presented.

Citation Download Citation

Norihisa Miki, Yumi Kosemura, Junpei Watanabe, and Hiroaki Ishikawa "MEMS tactile display: from fabrication to characterization", Proc. SPIE 8975, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII, 897506 (7 March 2014); https://doi.org/10.1117/12.2044127

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