Fabry-Perot color filter with antireflective nano-grating surface

Jiayuan Zhang; Jie Zhang; Xiaoxuan Dong

doi:10.1117/12.2037485

21 December 2013 Fabry-Perot color filter with antireflective nano-grating surface

Jiayuan Zhang, Jie Zhang, Xiaoxuan Dong

Proceedings Volume 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication; 90470G (2013) https://doi.org/10.1117/12.2037485
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China

Abstract

In order to improve the color saturation of reflective Fabry-Perot(FP) color filter, we proposed a reflective color filter incorporating FP resonator with a dielectric grating. The FP resonator consists of high reflection metal film, dielectric film and semi-transparent metal film. The dielectric grating, above the semi-transparent metal film, can reduce the reflection from the semi-transparent film in which case high saturation will be achieved. By using Finite Difference Time Domain(FDTD) method, the reflection spectra characteristic is analyzed as a function of duty cycle, period, refractive index and thickness of the dielectric grating. Based on the simulation results, a high performance color filter is proposed by optimizing the structural parameters. The full width at half-maximum (FWHM) reflection spectrum of the filters are reduced from 100 nm to 70 nm and the peak reflection efficiency of the filters are about 90%. The overlap of the tricolor output spectra decreases effectively, which will increase the color saturation of the color filter.

Citation Download Citation

Jiayuan Zhang, Jie Zhang, and Xiaoxuan Dong "Fabry-Perot color filter with antireflective nano-grating surface", Proc. SPIE 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 90470G (21 December 2013); https://doi.org/10.1117/12.2037485

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