Simple setup for optical characterization of microlenses

Stephane Perrin; Maciej Baranski; Nicolas Passilly; Luc Froehly; Jorge Albero; Sylwester Bargiel; Christophe Gorecki

doi:10.1117/12.2061299

18 August 2014 Simple setup for optical characterization of microlenses

Stephane Perrin, Maciej Baranski, Nicolas Passilly, Luc Froehly, Jorge Albero, Sylwester Bargiel, Christophe Gorecki

Proceedings Volume 9204, Interferometry XVII: Advanced Applications; 92040D (2014) https://doi.org/10.1117/12.2061299
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Scientific articles focusing on fabrication of micro-components often evaluate their optical performances by techniques such as scanning electron microscopy or surface topography only. However, deriving the optical characteristics from the shape of the optical element requires using propagation algorithms. In this paper, we present a simple and intuitive method, based on the measurement of the intensity point spread function generated by the micro-component. The setup is less expensive than common systems and does not require heavy equipments, since it requires only a microscope objective, a CMOS camera and a displacement stage. This direct characterization method consists in scanning axially and recording sequentially the focal volume. Our system, in transmissive configuration, consists in the investigation of the focus generated by the microlens, allowing measuring the axial and lateral resolutions, estimating the Strehl ratio and calculating the numerical aperture of the microlens. The optical system can also be used in reflective configuration in order to characterize micro-reflective components such as molds. The fixed imaging configuration allows rapid estimation of quality and repeatability of fabricated micro-optical elements.

Citation Download Citation

Stephane Perrin, Maciej Baranski, Nicolas Passilly, Luc Froehly, Jorge Albero, Sylwester Bargiel, and Christophe Gorecki "Simple setup for optical characterization of microlenses", Proc. SPIE 9204, Interferometry XVII: Advanced Applications, 92040D (18 August 2014); https://doi.org/10.1117/12.2061299

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available