A vertical scanning positioning system with large range and nanometer resolution for optical profiler

Qian Li; Xiaojun Liu; Zili Lei; Yi Zheng; Liangzhou Chen; Wenlong Lu

doi:10.1117/12.2181351

6 March 2015 A vertical scanning positioning system with large range and nanometer resolution for optical profiler

Qian Li, Xiaojun Liu, Zili Lei, Yi Zheng, Liangzhou Chen, Wenlong Lu

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94463C (2015) https://doi.org/10.1117/12.2181351
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

Piezoelectric ceramics with a flexible hinge guide was used for fine positioning at nanometer level, while a stepping motor was used for coarse positioning with a resolution at micrometer level, and their combination helped fulfillment of vertical scanning positioning with large range and nanometer resolution. A grating sensor was used for the real-time measurement of scanning displacement for close-loop positioning control. The properties of the flexible hinge guide was analyzed using ANSYS. Experimental results indicated the performance of the system was good. The system had a good application prospect in an optical profiler for surface measurement.

Citation Download Citation

Qian Li, Xiaojun Liu, Zili Lei, Yi Zheng, Liangzhou Chen, and Wenlong Lu "A vertical scanning positioning system with large range and nanometer resolution for optical profiler", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94463C (6 March 2015); https://doi.org/10.1117/12.2181351

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