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Yi Zheng
at Huazhong Univ of Science and Technology
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Publications (2)
Proceedings Article | 6 March 2015 Paper
A vertical scanning positioning system with large range and nanometer resolution for optical profiler
Qian Li, Xiaojun Liu, Zili Lei, Yi Zheng, Liangzhou Chen, Wenlong Lu
Proceedings Volume 9446, 94463C (2015) https://doi.org/10.1117/12.2181351
KEYWORDS: Ceramics, Optical scanning systems, Sensors, Optical resolution, Ferroelectric materials, Beam splitters, Diffraction gratings, Servomechanisms, Control systems, Actuators
Proceedings Article | 6 March 2015 Paper
Coarse-fine vertical scanning based optical profiler for structured surface measurement with large step height
Yi Zheng, Xiaojun Liu, Zili Lei, Qian Li, Xiao Yang, Liangzhou Chen, Wenlong Lu
Proceedings Volume 9446, 94463G (2015) https://doi.org/10.1117/12.2181368
KEYWORDS: Ferroelectric materials, 3D scanning, Optics manufacturing, Optical scanning systems, 3D metrology, Diffraction gratings, Manufacturing, Algorithm development, Charge-coupled devices, Signal processing
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