Coarse-fine vertical scanning based optical profiler for structured surface measurement with large step height

Yi Zheng; Xiaojun Liu; Zili Lei; Qian Li; Xiao Yang; Liangzhou Chen; Wenlong Lu

doi:10.1117/12.2181368

6 March 2015 Coarse-fine vertical scanning based optical profiler for structured surface measurement with large step height

Yi Zheng, Xiaojun Liu, Zili Lei, Qian Li, Xiao Yang, Liangzhou Chen, Wenlong Lu

Author Affiliations +

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94463G (2015) https://doi.org/10.1117/12.2181368
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

White light interference (WLI) optical profiler had been used widely for structured surface measurement. To achieve high measuring accuracy, piezoelectric ceramic (PZT) was usually used as the vertical scanning unit, which was normally less than 100um and only for small range structured surface measurement. With the development of advanced manufacturing technology, precision structured surfaces with large step height were appearing. To satisfy the measurement requirements of this kind of precision structured surfaces, WLI optical profiler with large range had to be developed. In this paper, an optical profiler was proposed, in which a coarse-fine vertical scanning system was adopted to expand its measurement range to 10mm while its resolution still at nanometer level.

Citation Download Citation

Yi Zheng, Xiaojun Liu, Zili Lei, Qian Li, Xiao Yang, Liangzhou Chen, and Wenlong Lu "Coarse-fine vertical scanning based optical profiler for structured surface measurement with large step height", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94463G (6 March 2015); https://doi.org/10.1117/12.2181368

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