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We present two types of advanced monochromatic High Resolution X-ray Imaging microscopes (HRXI) who have high spatial resolution capability (3-6 μm) and high efficiency. The first microscope so-called MERSSIX consists of two toroïdals mirrors mounted into a Wolter type geometry and working at grazing incidence. Non-periodic multilayer (depth graded) mirrors were developed with special coatings designed to provide broadband X-ray reflectance in the 1 - 22 keV energy range. Associated to this Wolter microscope a potential monochromatic third mirror coated with a multilayer stack can be used for monochromatic application in that range. The second microscope is composed of a transmission gold Fresnel Phase Zone Plate (FPZP) and a narrow bandwidth multilayer mirror. We present an experimental study with X-ray plasma-source and a complete characterization of the X-ray optics on the synchrotron radiation facility BESSY II. Potentialities (a few μspatial resolution monochromatic images) and complementarity of these two monochromatic HRXI are discussed. The design of the MLs for each microscope is detailed. |
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Mirrors
Microscopes
X-ray imaging
Reflectivity
Multilayers
X-rays
Spatial resolution
