PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
In this talk, we report a large-scale fabrication of Mid-IR metasurfaces by using a newly developed method. The metasurfaces were produced on transparent alumina membranes. Functionalities such as quasi-bound-state-in-the-continuum (quasi-BIC) resonances, mid-IR focusing, and polarization control were realized in different dielectric metasurfaces. Metasurfaces comprising aluminum nanoantennas were also fabricated and integrated into microfluidic devices for biosensing. The reported fabrication method is CMOS compatible and able to produce metasurfaces over whole Si wafers with high precision and uniformity. This work serves as a significant step in the direction of practical applications and commercialization of Mid-IR metasurfaces [Adv. Mater. 33, 2102232 (2021)].
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Ming Lun Tseng, Aleksandrs l. Leitis, Aurelian John-Herpin, Yuri S. Kivshar, Hatice Altug, "Wafer-scale nanofabrication of functional metasurfaces," Proc. SPIE PC12197, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XX, PC121970P (3 October 2022); https://doi.org/10.1117/12.2632574