In this talk, we report a large-scale fabrication of Mid-IR metasurfaces by using a newly developed method. The metasurfaces were produced on transparent alumina membranes. Functionalities such as quasi-bound-state-in-the-continuum (quasi-BIC) resonances, mid-IR focusing, and polarization control were realized in different dielectric metasurfaces. Metasurfaces comprising aluminum nanoantennas were also fabricated and integrated into microfluidic devices for biosensing. The reported fabrication method is CMOS compatible and able to produce metasurfaces over whole Si wafers with high precision and uniformity. This work serves as a significant step in the direction of practical applications and commercialization of Mid-IR metasurfaces [Adv. Mater. 33, 2102232 (2021)].
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.