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13 March 2013 Thermomechanical design, hybrid fabrication, and testing of a MOEMS deformable mirror
Claudia Reinlein, Michael Appelfelder, Sylvia E. Gebhardt, Erik Beckert, Ramona Eberhardt, Andreas Tünnermann
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Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 12, Issue 1, 013016 (March 2013). https://doi.org/10.1117/1.JMM.12.1.013016
Abstract
This paper reports on the thermomechanical modeling and characterization of a micro-opto-electro-mechanical systems deformable mirror (DM). This unimorph DM offers a low-temperature cofired ceramic substrate with screen-printed piezoceramic actuators on its rear surface and a machined copper layer on its front surface. We present the DM setup, thermomechanical modeling, and hybrid fabrication. The setup of the DM is transferred into a thermomechanical model in ANSYS Multiphysics. The thermomechanical modeling of the DM evaluates and optimizes the mount material and the copper-layer thickness for the loading cases: homogeneous thermal loading and laser-loading of the mirror. Subsequently, the developed and theoretically optimized DM setup is experimentally validated. The homogeneous loading of the optimized design results in a membrane deformation with a rate of −0.2  μm K −1 , whereas the laser loading causes an opposed change with a rate of −0.2  μm W −1 . Therefore, the proposed mirror design is suitable to precompensate laser-generated mirror deformations by homogeneous thermal loading (heating). We experimentally show that a 35-K preheating of the mirror assembly compensates for an absorbed laser power of 1.25 W. Therefore, the novel compensation regime “compound loading” for the suppression of laser-induced deformations is developed and proven.
CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
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Claudia Reinlein, Michael Appelfelder, Sylvia E. Gebhardt, Erik Beckert, Ramona Eberhardt, and Andreas Tünnermann "Thermomechanical design, hybrid fabrication, and testing of a MOEMS deformable mirror," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(1), 013016 (13 March 2013). https://doi.org/10.1117/1.JMM.12.1.013016
Published: 13 March 2013
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Cited by 7 scholarly publications.
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KEYWORDS
Mirrors
Copper
Actuators
Microopto electromechanical systems
Temperature metrology
Deformable mirrors
Ceramics
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