Electrostatic stiffness correction for quadrature error in decoupled dual-mass MEMS gyroscope

Hongsheng Li; Huiliang Cao; Yunfang Ni

doi:10.1117/1.JMM.13.3.033003

14 July 2014 Electrostatic stiffness correction for quadrature error in decoupled dual-mass MEMS gyroscope

Hongsheng Li, Huiliang Cao, Yunfang Ni

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 13, Issue 3, 033003 (July 2014). https://doi.org/10.1117/1.JMM.13.3.033003

Abstract

This paper proposes an electrostatic stiffness correction method for the quadrature error (QUER) in a decoupled dual-mass gyroscope structure. The QUER is caused by the imperfections during the structure manufacturing process, and the two masses usually have different QUERs. The harm contribution to the Coriolis signal is analyzed and quantified. The generating forms of QUER motion in both masses are analyzed, the correction electrodes’ working principle is introduced, and a single mass individual correction method is proposed. The QUER stiffness correction system is designed based on a PI controller, and the experiments are arranged to verify the theoretical analysis. The bias stability decreases from 2.06 to 0.64 deg/h after the QUER correction, and the parameters of scale factor such as nonlinearly, asymmetry, and repeatability, reduce from 143, 557, and 210 ppm to 84, 242, and 175 ppm, respectively.

Citation Download Citation

Hongsheng Li, Huiliang Cao, and Yunfang Ni "Electrostatic stiffness correction for quadrature error in decoupled dual-mass MEMS gyroscope," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(3), 033003 (14 July 2014). https://doi.org/10.1117/1.JMM.13.3.033003

Published: 14 July 2014

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