Generic detrending of surface profiles

Hendrik Rothe; Angela Duparre; Stefan Jakobs

doi:10.1117/12.177523

1 September 1994 Generic detrending of surface profiles

Hendrik Rothe, Angela Duparre, Stefan Jakobs

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Optical Engineering, Vol. 33, Issue 9, (September 1994). https://doi.org/10.1117/12.177523

Abstract

A commonly used estimator for the microtopography of an optical surface is its rms-roughness. Raw surface profile data may contain trending components. Therefore they should be subjected to a detrending procedure before estimating the rms value. This procedure is limited in most cases to the removal of piston, slope, and curvature. Consequently, undesired artifacts may arise, which negatively influence the precision of rms-roughness estimation. In scanning surface metrology, the eigenvalues and eigenvectors of the covariance matrix of the surface can be used for a robust and precise multivariate estimation of rms-roughness.

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Hendrik Rothe, Angela Duparre, and Stefan Jakobs "Generic detrending of surface profiles," Optical Engineering 33(9), (1 September 1994). https://doi.org/10.1117/12.177523

Published: 1 September 1994

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