Dr. Akiko Hirai
Researcher at National Institute of Advanced Industrial Science and Technology
SPIE Involvement:
Author
Publications (26)

Proceedings Article | 10 April 2024 Presentation
Ryosuke Kizu, Kazuhiro Kumagai, Ichiko Misumi, Akiko Hirai, Satoshi Gonda
Proceedings Volume 12955, 129551U (2024) https://doi.org/10.1117/12.3010107
KEYWORDS: Shrinkage, Photoresist materials, Extreme ultraviolet lithography, Atomic force microscopy

SPIE Journal Paper | 7 December 2023
JM3, Vol. 22, Issue 04, 044002, (December 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.4.044002
KEYWORDS: Shrinkage, Photoresist materials, Line edge roughness, Scanning electron microscopy, Atomic force microscopy, 3D metrology, Lithography, Metrology, Fractal analysis, Electron beams

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 1249605 (2023) https://doi.org/10.1117/12.2655566
KEYWORDS: Shrinkage, Photoresist materials, Line edge roughness, Scanning electron microscopy, Atomic force microscopy, Metrology, Lithography, Deformation, Critical dimension metrology, 3D metrology

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12053, PC1205307 (2022) https://doi.org/10.1117/12.2614122
KEYWORDS: Photoresist materials, Line edge roughness, Metrology, Atomic force microscopy, Scanning electron microscopy, Lithography, Anisotropy, Silicon, 3D metrology, Reliability

SPIE Journal Paper | 30 May 2022
JM3, Vol. 21, Issue 02, 024001, (May 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.024001
KEYWORDS: Scanning electron microscopy, Line edge roughness, Metrology, Atomic force microscopy, Spatial resolution, Error analysis, Denoising, Silicon, Edge roughness, 3D metrology

Showing 5 of 26 publications
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