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Alexander V. Scherbakov
at Institute for Physics of Microstructures RAS
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Publications (1)
Proceedings Article | 31 May 2017 Paper
High-aperture monochromator-reflectometer and its usefulness for CCD calibration
Eugene Vishnyakov, Alexander Shcherbakov, Andrei Pertsov, Vladimir Polkovnikov, Alexey Pestov, Dmitry Pariev, Nikolai Chkhalo
Proceedings Volume 10235, 102350W (2017) https://doi.org/10.1117/12.2264814
KEYWORDS: Charge-coupled devices, X-rays, Calibration, Mirrors, Objectives, Thin films, Optical filters, Multilayers, Reflectometry, Monochromators, EUV optics, Sensors, Plasma, Photons, Extreme ultraviolet
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