Holographic three dimensional (3D) parallel lithography using femtosecond laser pulse were demonstrated in this paper.
A computer generated hologram (CGH) that calculated using kinoform algorithm with optimal rotation angle (ORA)
method were used in order to increase the uniformity of the diffraction peaks so that the resolution of the 3D image also
improved. The use of femtosecond pulse duration of a Ti:sapphire laser improved the holograms resolution due to larger
peak powers that generate larger photonics concentrations at the beam focus and improve single-shot processing. A
digital instrument nanoscope was used to verify the result and scanning electron microscopy (SEM) will be used to
observe the detail result.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.