CONFERENCE PROCEEDINGS
Advanced Search
Brooks Kim
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 14 May 2004 Paper
Influence of resin properties to resist performance at ArF lithography
Sangwoong Yoon, Myungsun Kim, Hong Lee, Do Kim, Young Hoon Kim, Boo Deuk Kim, Jae Hyun Kim, Kyung-Mee Kim, Shi Yong Lee, Young Ho Kim, Sang-Mun Chon
Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.533950
KEYWORDS: Line edge roughness, Lithography, Palladium, Polymers, Ultraviolet radiation, Polymerization, Manganese, Photoresist materials, Sensors, Critical dimension metrology
Proceedings Article | 14 May 2004 Paper
Analysis of solvent effect to control the BARC coating uniformity
Min-Ho Jung, Sangwoong Yoon, Eun-Soon Chung, Beom-Sang Yoo, Jeong Yun Ya, Don Winning, Boo Deuk Kim, Hong Lee, Do Young Kim, Young Hoon Kim, Myungsun Kim, Young Ho Kim, Sang-Mun Chon
Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.533924
KEYWORDS: Coating, Humidity, Polymers, Statistical modeling, Control systems, Reflectivity, Photoresist materials, Manufacturing, Chemistry, Inspection
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top