Mr. Chien-Lin Lee Profile

Chien-Lin Lee

Doctoral Candidate at National Taiwan Univ

SPIE Involvement:

Author

Publications (8)

SPIE Journal Paper | 29 July 2021

Investigation on helium ion beam lithography with proximity effect correction

Chien-Lin Lee, Sheng-Wei Chien, Kuen-Yu Tsai, Chun-Hung Liu

JM3, Vol. 20, Issue 03, 033201, (July 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.3.033201

KEYWORDS: Point spread functions, Helium, Ion beam lithography, Process modeling, Optical lithography, Modulation, Scattering, Laser scattering, Electron beam lithography, Photoresist processing

Read Abstract +

SPIE Journal Paper | 10 July 2021

Efficient electrical characteristics estimation techniques for sub-20-nm FDSOI integrated circuits with nonrectangular gate patterning effects

Jia-Syun Cai, Sheng-Wei Chien, Xin-Yang Zheng, Chien-Lin Lee, Kuen-Yu Tsai

JM3, Vol. 20, Issue 03, 033401, (July 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.3.033401

KEYWORDS: TCAD, Transistors, Device simulation, 3D modeling, Integrated circuits, Instrument modeling, Lithography, Error analysis, Logic, Doping

Read Abstract +

SPIE Journal Paper | 27 April 2021

Precision fabrication of EUVL programmed defects with helium ion beam patterning

Chien-Lin Lee, Jia-Syun Cai, Sheng-Wei Chien, Kuen-Yu Tsai, Jia-Han Li, Chao-Te Lee

JM3, Vol. 20, Issue 02, 023001, (April 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.2.023001

KEYWORDS: Optical lithography, Palladium, Helium, Ion beams, Direct write lithography, Metrology, Extreme ultraviolet lithography, Lithography, Silicon, Glasses

Read Abstract +

Proceedings Article | 1 October 2019 Paper

Precision fabrication of EUVL programmed defects with helium ion beam lithography

Chien-Lin Lee, Jia-Syun Cai, Sheng-Wei Chien, Kuen-Yu Tsai

Proceedings Volume 11147, 111471J (2019) https://doi.org/10.1117/12.2536874

KEYWORDS: Metrology, Optical lithography, Helium, Extreme ultraviolet lithography, Lithography, Ion beam lithography

Read Abstract +

Proceedings Article | 20 March 2019 Presentation + Paper

Investigation on MBOPC convergence improvement with location-dependent correction factors aided by machine learning

Sheng-Wei Chien, Jia-Syun Cai, Chien-Lin Lee, Kuen-Yu Tsai, James Shiely, Matt St. John

Proceedings Volume 10961, 1096107 (2019) https://doi.org/10.1117/12.2515414

KEYWORDS: Optical proximity correction, Lithography, Photomasks, Machine learning, Computational lithography

Read Abstract +

Proceedings Article | 20 March 2019 Presentation + Paper

Accuracy improvement of electrical characteristics estimation for sub-20nm FDSOI devices with non-rectangular gates

Jia-Syun Cai, Sheng-Wei Chien, Xin-Yang Zheng, Chien-Lin Lee, Kuen-Yu Tsai

Proceedings Volume 10962, 109620I (2019) https://doi.org/10.1117/12.2515186

KEYWORDS: TCAD, Transistors, Device simulation, Extreme ultraviolet lithography, Lithography

Read Abstract +

Proceedings Article | 19 March 2018 Paper

Model-based proximity effect correction for helium ion beam lithography

Chien-Lin Lee, Sheng-Wei Chien, Kuen-Yu Tsai

Proceedings Volume 10584, 105841C (2018) https://doi.org/10.1117/12.2297691

KEYWORDS: Point spread functions, Process modeling, Helium, Modulation, Scattering, Model-based design, Ion beam lithography

Read Abstract +

Proceedings Article | 28 March 2017 Presentation + Paper

Fabrication of metrology test structures with helium ion beam direct write

Chien-Lin Lee, Sheng-Wei Chien, Sheng-Yung Chen, Chun-Hung Liu, Kuen-Yu Tsai, Jia-Han Li, Bor-Yuan Shew, Chit-Sung Hong, Chao-Te Lee

Proceedings Volume 10145, 1014519 (2017) https://doi.org/10.1117/12.2257989

KEYWORDS: Metrology, Electron beam lithography, Lithography, Helium, Ion beams, Critical dimension metrology, Inspection, Photoresist processing, Optical lithography, Bridges

Read Abstract +

Showing 5 of 8 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years