Sensory machine elements with integrated force sensors are paving the way for accurate load condition monitoring in machine tools. However, some machine elements face a fundamental measurement challenge: the intended high stiffness reduces any deformation during the operational lifespan drastically. In this study, an approach for high-resolution acquisition of elastic structure deformation under load in very stiff machine elements is presented. A novel optical image-based and structure-integrated deflection sensor allows a cost-effective two-dimensional deflection measurement with a measurement resolution of up to 90 nm and an accurate spatial resolution of the force direction. In particular, the change from local strain detection by strain gauge films to displacement measurements of reference planes allows for an increase of the measurement resolution. This paper discusses the relevant aspects and demonstrates the achieved measurement resolution by a biaxial sensory bending roll for the split profile bending process based on an optical image-based deflection sensor.
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