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Chunlin Wang
at Tongji Univ
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Publications (1)
Proceedings Article | 18 April 2021 Presentation + Paper
Damage study on B4C films using a table-top nanosecond EUV damage instrument
Wenbin Li, Chunlin Wang, Liuyang Pan, Jiali Wu, Jinyu Cao, Qiushi Huang, Chun Xie, Zhanshan Wang
Proceedings Volume 11776, 117760V (2021) https://doi.org/10.1117/12.2590040
KEYWORDS: Extreme ultraviolet, Sputter deposition, Free electron lasers, Chromium, Adhesives, Scanning electron microscopy, Laser damage threshold, Coating, X-rays, Resistance
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