Dr. Davide Dattilo
at SUSS MicroTec Solutions GmbH & Co KG
SPIE Involvement:
Author
Publications (9)

SPIE Journal Paper | 21 June 2023
Devesh Thakare, Meiyi Wu, Karl Opsomer, Qais Saadeh, Victor Soltwisch, Philipp Naujok, Christophe Detavernier, Davide Dattilo, Markus Foltin, Andy Goodyear, Mike Cooke, Annelies Delabie, Vicky Philipsen
JM3, Vol. 22, Issue 02, 024403, (June 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.2.024403
KEYWORDS: Alloys, Extreme ultraviolet, Tantalum, Nanoimprint lithography, Etching, Oxides, Silicon, Ruthenium, Light sources and illumination, Film thickness

Proceedings Article | 3 October 2018 Presentation + Paper
Davide Dattilo, Sebastian Dietze, Martin Samayoa, Uwe Dietze, Victoria Dahl, Zhenxing Han
Proceedings Volume 10810, 108100R (2018) https://doi.org/10.1117/12.2503937
KEYWORDS: Pellicles, Inspection, Scanning probe microscopy, Photomasks, Optical inspection, Reticles, Chemistry, Visualization, Polymers, Particles

Proceedings Article | 20 October 2016 Paper
Zhenxing Han, Berthold Ferstl, Günter Oetter, Uwe Dietze, Martin Samayoa, Davide Dattilo
Proceedings Volume 10032, 1003207 (2016) https://doi.org/10.1117/12.2248594
KEYWORDS: Particles, Cavitation, Acoustics, Acoustic cavitation, Photomasks, Photons, Chemistry, Transducers, Extreme ultraviolet, Sonoluminescence

Proceedings Article | 23 October 2015 Paper
Jaehyuck Choi, Jinsu Kim, Jeff Lowe, Davide Dattilo, Soowan Koh, Jun Yeol Choi, Uwe Dietze, Tsutomu Shoki, Byung Gook Kim, Chan-Uk Jeon
Proceedings Volume 9635, 96350C (2015) https://doi.org/10.1117/12.2197226
KEYWORDS: Extreme ultraviolet, Carbon, Photomasks, Extreme ultraviolet lithography, Ruthenium, Industrial chemicals, Particles, Scanning probe microscopy, Mask cleaning, Pellicles

Proceedings Article | 23 October 2015 Paper
Proceedings Volume 9635, 96351B (2015) https://doi.org/10.1117/12.2202188
KEYWORDS: Oxidation, Ruthenium, Metals, Extreme ultraviolet, Silicon, Ions, Scanning electron microscopy, Photomasks, Oxygen, Ozone

Showing 5 of 9 publications
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