This report addresses the question of material conductivity (electrically isolating/dissipative/conductive) of reticle carrier and the reticle contact points in reticle carriers and its effect in protecting the reticle from field induced electrostatic discharge damage (ESD). Materials with different electrical properties were investigated; tests included measurements of surface resistivity, resistance to ground, charging, field induced and shielding efficiency. The impact of different materials on protecting reticles from ESD is also studied in an experimental setup using ESD sensitive CANARYTM reticles. A recommendation of ESD protection through material choice and its electrical properties is given.
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