Dr. Dongsoo Kim Profile

Dr. Dongsoo Kim

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Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper

Statistical process optimization method for metrology equipment

Dongsoo Kim, Moran Zaberchik, Chen Li, Honggoo Lee, Chanha Park, Sangho Lee, Dongyoung Lee, Scott Beatty, Jae Park, Ramkumar Karur-Shanmugam, Telly Koffas, Dohwa Lee, Sanghuck Jeon, Dongsub Choi, Efi Megged, Nir BenDavid, Hedvi Spielberg

Proceedings Volume 11611, 1161123 (2021) https://doi.org/10.1117/12.2583638

KEYWORDS: Optimization (mathematics), Metrology, Semiconducting wafers, Statistical methods, Statistical analysis, Time metrology, Overlay metrology, Diffractive optical elements

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Proceedings Article | 22 February 2021 Presentation

Memory OPO improvement using novel target design

Eitan Hajaj, Honggoo Lee, Chanha Park, Sangho Lee, Dongyoung Lee, Dohwa Lee, Dongsoo Kim, Sanghuck Jeon, Dongsub Choi, Eltsafon Ashwal, Chen Dror, Raviv Yohanan, Zephyr Liu, xiaolei liu, Diana Shaphirov, Katya Gordon, Mark Ghinovker

Proceedings Volume 11611, 1161137 (2021) https://doi.org/10.1117/12.2584524

KEYWORDS: Overlay metrology, Optical parametric oscillators, Standards development, Manufacturing, Integrated circuits

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