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Erik Schuring
at TNO
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Publications (1)
Proceedings Article | 22 November 2023 Poster
Exploring interactions between hydrogen plasma and construction materials
Kleopatra Papamichou, Thomas Mechielsen, Aneta Stodólna, Erik Schuring, Henk Lensen
Proceedings Volume PC12750, PC127500R (2023) https://doi.org/10.1117/12.2686862
KEYWORDS: Hydrogen, Plasma, Aluminum, Extreme ultraviolet, X-ray photoelectron spectroscopy, Semiconducting wafers, Chemical composition, Wafer-level optics, Scattering, Printing
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