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Eugene Su
at National Taipei Univ of Technology
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Author
Publications (3)
Proceedings Article | 10 April 2024 Poster + Paper
Prediction of critical dimensions for 3D TSV structures using artificial neural network
Proceedings Volume 12955, 129552J (2024) https://doi.org/10.1117/12.3010132
KEYWORDS: Finite-difference time-domain method, Reflectivity, Artificial neural networks, Simulations, Reflection, Critical dimension metrology, Modeling, Electromagnetic simulation, Education and training, Spectral data processing
SPIE Journal Paper | 19 January 2024
Enhancing titanium spacer defect detection through reinforcement learning-optimized digital twin and synthetic data generation
Sankarsan Mohanty, Eugene Su, Chao-Ching Ho
JEI, Vol. 33, Issue 01, 013021, (January 2024) https://doi.org/10.1117/12.10.1117/1.JEI.33.1.013021
KEYWORDS: Education and training, Data modeling, Defect detection, Inspection, Titanium, Holmium, Light sources and illumination, Performance modeling, Cameras, Windows
Proceedings Article | 11 August 2023 Presentation + Paper
Reinforcement learning optimized digital twin based synthetic data generation for defect detection of titanium spacer
Sankarsan Mohanty, Eugene Su, Chao-Ching Ho
Proceedings Volume 12623, 1262308 (2023) https://doi.org/10.1117/12.2673529
KEYWORDS: Data modeling, Inspection, Windows, Image processing, Data acquisition
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