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Franck Iutzeler
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Publications (1)
Proceedings Article | 22 February 2021 Presentation + Paper
Unsupervised density-based machine learning for abnormal leveling signatures detection
Proceedings Volume 11611, 116111N (2021) https://doi.org/10.1117/12.2581468
KEYWORDS: Semiconducting wafers, Metrology, Zernike polynomials, Process control, Machine learning, Scanners, Wafer-level optics, Sensors, Semiconductor manufacturing, Overlay metrology
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