Dr. Frank Rutz Profile

Dr. Frank Rutz

Researcher at Fraunhofer IAF

SPIE Involvement:

Conference Program Committee | Author

Publications (35)

Proceedings Article | 1 November 2024 Presentation + Paper

Progress on InGaAs-based SPAD fabrication for SWIR detection and imaging

Frank Rutz, Andreas Wörl, Andreas Bächle, Jasmin Niemasz, Robert Rehm

Proceedings Volume 13200, 132000Z (2024) https://doi.org/10.1117/12.3031445

KEYWORDS: Single photon avalanche diodes, Short wave infrared radiation, Diffusion, Doping, Zinc, Indium gallium arsenide, Fabrication, Etching, Quantum efficiency, Electric fields, Semiconductor process technologies

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Proceedings Article | 7 June 2024 Presentation + Paper

Advances in entangled-photon sources and single-photon avalanche diodes for quantum technologies in the SWIR

Frank Rutz, Thorsten Passow, Andreas Wörl, Raphael Müller, Quankui Yang, Vivienne Leidel, Andreas Bächle, Elke Diwo-Emmer, Jasmin Niemasz, Silvia Giudicatti, Volker Daumer, Robert Rehm

Proceedings Volume 13025, 130250B (2024) https://doi.org/10.1117/12.3013721

KEYWORDS: Single photon avalanche diodes, Photons, Diffusion, Quantum entanglement, Short wave infrared radiation, Etching, Zinc, Refractive index, Quantum technologies, Quantum processes

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Proceedings Article | 23 October 2023 Presentation + Paper

Investigation of InGaAsSb-based heterojunction photodiodes for extended SWIR imaging

A. Wörl, R. Müller, V. Daumer, J. Niemasz, F. Rutz, R. Rehm

Proceedings Volume 12737, 1273707 (2023) https://doi.org/10.1117/12.2680004

KEYWORDS: Photodiodes, Indium gallium arsenide antimonide, Short wave infrared radiation, Dark current, Heterojunctions, Gallium antimonide, Indium gallium arsenide, Photodetectors, Indium, Infrared imaging

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Proceedings Article | 17 October 2023 Presentation + Paper

Fabrication of InGaAs/InP single-photon avalanche diodes for SWIR active imaging

F. Rutz, A. Wörl, A. Bächle, J. Niemasz, R. Rehm

Proceedings Volume 12740, 127400C (2023) https://doi.org/10.1117/12.2675617

KEYWORDS: Single photon avalanche diodes, Diffusion, Zinc, Short wave infrared radiation, Indium gallium arsenide, Fabrication, Active imaging, Quantum processes, Metalorganic chemical vapor deposition, LIDAR

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Proceedings Article | 12 July 2023 Open Access

III-V-based high-performance photodetectors in the non-visible regime: from UV to IR

Volker Daumer, R. Aidam, Andreas Bächle, Rachid Driad, Tsvetelina Hugger, R. Keil, Lutz Kirste, Stefano Leone, Wolfgang Luppold, Christian Manz, Raphael Müller, Jasmin Niemasz, Thorsten Passow, Robert Rehm, Frank Rutz, Tim Stadelmann, Mark Wobrock, Andreas Wörl, Quankui Yang

Proceedings Volume 12777, 127772F (2023) https://doi.org/10.1117/12.2689983

KEYWORDS: Dark current, Photodetectors, Detector arrays, Ultraviolet radiation, Mid-IR, Staring arrays, Short wave infrared radiation, Diodes, Readout integrated circuits, Long wavelength infrared

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Proceedings Article | 9 October 2019 Paper

Low-light-level SWIR photodetectors based on the InGaAs material system

F. Rutz, R. Aidam, A. Bächle, J. Niemasz, A. Zibold, M. Schepperle, R. Rehm

Proceedings Volume 11159, 1115906 (2019) https://doi.org/10.1117/12.2533015

KEYWORDS: Short wave infrared radiation, Indium gallium arsenide, Photodetectors, Laser sources, LIDAR, Avalanche photodetectors, PIN photodiodes, Sensors, Infrared imaging, Infrared radiation

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The short-wavelength infrared (SWIR) regime between 1 and 3 μm is of high interest especially for surveillance, reconnaissance, and remote sensing applications. The availability of high-power, yet eye-safe SWIR laser sources is an important asset enabling scene illumination and implementation of advanced active imaging concepts like gated viewing (GV) or light detection and ranging (LIDAR). With atmospheric nightglow also a natural, but faint source for scene illumination is available for passive low-light-level imaging in the SWIR region. The most commonly employed material system for realizing SWIR photodetectors is InGaAs with an indium content of 53%. The spectral sensitivity of In_0.53Ga_0.47As with its cut-off wavelength of 1.7 μm covers a wide part of the nightglow spectrum as well the emission lines of available laser sources at typical telecom wavelengths around 1.55 μm. However, for low-light-level passive SWIR imaging a dark-current density around 10^-9 A/cm² is considered mandatory. While the international state-of-the-art has already achieved this performance at room-temperature operation, today’s European stateof- the-art is still lagging behind. The development of InGaAs-based SWIR detectors at Fraunhofer IAF aims at pin as well as avalanche photodiodes (APDs) for imaging applications with 640×512 pixels. While InGaAs APDs play to their strength in GV applications with typically rather short integration times, planar processed InGaAs/InP pin photodiodes with lowest possible dark-current and noise characteristics are the detector devices of choice for passive low-light-level detection. Within a few planar-process batches, we approached the European state-of-the-art for the dark-current density of 15-μm-pitch InGaAs pin detectors by a remaining factor of five. The most recent process run yielded further slightly improved dark-current characteristics on test devices. Recently, we have started with in-house characterization of such focal plane detector arrays hybridized with suitable SWIR read-out integrated circuits.

Proceedings Article | 12 July 2019 Open Access

Type-II superlattices: a promising material for space applications

V. Daumer, F. Rutz, A. Wörl, J. Niemasz, R. Müller, T. Stadelmann, R. Rehm

Proceedings Volume 11180, 111806J (2019) https://doi.org/10.1117/12.2536154

KEYWORDS: Sensors, Heterojunctions, Mercury cadmium telluride, Superlattices, Long wavelength infrared, Gallium antimonide, Detector arrays, Mid-IR, Indium arsenide, Semiconducting wafers

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Proceedings Article | 7 May 2019 Paper

Industrialization of type-II superlattice infrared detector technology at Fraunhofer IAF

M. Walther, V. Daumer, F. Rutz, T. Stadelmann, V. Klinger, A. Wörl, J. Niemasz, L. Kirste, R. Rehm

Proceedings Volume 11002, 110020C (2019) https://doi.org/10.1117/12.2518424

KEYWORDS: Sensors, Superlattices, Diodes, Infrared detectors, Gallium antimonide, Indium arsenide, Semiconducting wafers, Mercury cadmium telluride, Infrared sensors

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Proceedings Article | 7 May 2019 Paper

InGaAs SWIR photodetectors for night vision

F. Rutz, A. Bächle, R. Aidam, J. Niemasz, W. Bronner, A. Zibold, R. Rehm

Proceedings Volume 11002, 1100211 (2019) https://doi.org/10.1117/12.2518634

KEYWORDS: Short wave infrared radiation, Indium gallium arsenide, Cameras, Photodetectors, PIN photodiodes, Avalanche photodetectors, Sensors, Imaging systems, Staring arrays, Night vision

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Proceedings Article | 9 October 2018 Paper

InGaAs-based SWIR photodetectors for night vision and gated viewing

F. Rutz, R. Aidam, A. Bächle, H. Heußen, W. Bronner, R. Rehm, M. Benecke, A. Sieck, S. Brunner, B. Göhler, P. Lutzmann

Proceedings Volume 10795, 1079503 (2018) https://doi.org/10.1117/12.2325665

KEYWORDS: Short wave infrared radiation, Avalanche photodetectors, Cameras, Sensors, Indium gallium arsenide, Zinc, Diffusion, Staring arrays, Photodetectors, Gated imaging, Night vision

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Proceedings Article | 23 May 2018 Paper

Type II superlattice infrared photodetector research at Fraunhofer IAF

T. Stadelmann, V. Daumer, V. Gramich, T. Hugger, L. Kirste, V. Klinger, N. Kohn, W. Luppold, R. Müller, J. Niemasz, R. Rehm, F. Rutz, J. Schmidt, M. Walther, M. Wauro, A. Wörl

Proceedings Volume 10624, 106240J (2018) https://doi.org/10.1117/12.2305116

KEYWORDS: Semiconducting wafers, Sensors, Photodiodes, Mid-IR, Heterojunctions, Long wavelength infrared, Photodetectors, Diodes, Superlattices, Infrared sensors

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Proceedings Article | 16 May 2017 Paper

Photodetector development at Fraunhofer IAF: From LWIR to SWIR operating from cryogenic close to room temperature

V. Daumer, V. Gramich, R. Müller, J. Schmidt, F. Rutz, T. Stadelmann, A. Wörl, R. Rehm

Proceedings Volume 10177, 1017711 (2017) https://doi.org/10.1117/12.2262509

KEYWORDS: Heterojunctions, Avalanche photodetectors, Diodes, Infrared radiation, Photodetectors, Mid-IR, Sensors, Long wavelength infrared, Short wave infrared radiation, Infrared sensors, Superlattices, Thermography, Indium gallium arsenide

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Proceedings Article | 21 October 2016 Paper

Advances in the characterization of InAs/GaSb superlattice infrared photodetectors

A. Wörl, V. Daumer, T. Hugger, N. Kohn, W. Luppold, R. Müller, J. Niemasz, R. Rehm, F. Rutz, J. Schmidt, J. Schmitz, T. Stadelmann, M. Wauro

Proceedings Volume 9987, 99870U (2016) https://doi.org/10.1117/12.2240949

KEYWORDS: Sensors, Imaging systems, Superlattices, Infrared radiation, Photodetectors, Long wavelength infrared, Diodes, Semiconducting wafers, Electro optics, Heterojunctions

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Proceedings Article | 19 September 2016 Paper

SWIR detectors for low photon fluxes

Frank Rutz, Philipp Kleinow, Rolf Aidam, Wolfgang Bronner, Lukas Stolch, Matthias Benecke, Alexander Sieck, Robert Rehm

Proceedings Volume 9974, 99740G (2016) https://doi.org/10.1117/12.2236484

KEYWORDS: Short wave infrared radiation, Sensors, Photodetectors, Avalanche photodetectors, Cameras, Readout integrated circuits, Indium gallium arsenide, Signal to noise ratio, Electro optical sensors, Electro optics

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Proceedings Article | 20 May 2016 Paper

Type-II superlattice infrared detector technology at Fraunhofer IAF

Robert Rehm, Volker Daumer, Tsvetelina Hugger, Norbert Kohn, Wolfgang Luppold, Raphael Müller, Jasmin Niemasz, Johannes Schmidt, Frank Rutz, Tim Stadelmann, Matthias Wauro, Andreas Wörl

Proceedings Volume 9819, 98190X (2016) https://doi.org/10.1117/12.2223887

KEYWORDS: Infrared detectors, Sensors, Superlattices, Long wavelength infrared, Infrared sensors, Mid-IR, Photodetectors, Imaging systems, Semiconducting wafers, Mercury cadmium telluride

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Proceedings Article | 13 May 2015 Paper

SWIR photodetector development at Fraunhofer IAF

F. Rutz, P. Kleinow, R. Aidam, H. Heussen, W. Bronner, A. Sieck, M. Walther

Proceedings Volume 9481, 948107 (2015) https://doi.org/10.1117/12.2177802

KEYWORDS: Avalanche photodetectors, Short wave infrared radiation, Indium gallium arsenide, Sensors, Cameras, Staring arrays, Photodetectors, PIN photodiodes, Doping, Imaging systems

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Proceedings Article | 7 October 2014 Paper

Optimization of InGaAs/InAlAs APDs for SWIR detection with demand for high gain and low breakdown voltage

P. Kleinow, F. Rutz, R. Aidam, W. Bronner, H. Heussen, M. Walther

Proceedings Volume 9249, 92490Y (2014) https://doi.org/10.1117/12.2067242

KEYWORDS: Short wave infrared radiation, Calibration, Cameras, Data acquisition, Imaging systems, Sensors, Data modeling, Hyperspectral imaging, Georeferencing, Image processing

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Proceedings Article | 6 August 2014 Paper

Characterization of new components for a miniaturized heterodyne infrared spectrometer

Pia Krause, Guido Sonnabend, Lucas Labadie, Manuela Sornig, Robert Thomson, Alexander Arriola, Arian Rodenas, Tilak Hewagama, Frank Rutz

Proceedings Volume 9147, 91475H (2014) https://doi.org/10.1117/12.2056713

KEYWORDS: Heterodyning, Waveguides, Sensors, Infrared spectroscopy, Quantum cascade lasers, Oscillators, Spectroscopy, Earth's atmosphere, Infrared radiation, Temperature metrology

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Proceedings Article | 31 January 2014 Paper

Infrared photodetector development at Fraunhofer IAF

F. Rutz, P. Kleinow, M. Walther, R. Aidam, W. Bronner, L. Kirste, J. Niemasz, R. Rehm, J. Schmitz, T. Stadelmann, M. Wauro, A. Wörl, A. Sieck, J. Ziegler

Proceedings Volume 8993, 89930W (2014) https://doi.org/10.1117/12.2039521

KEYWORDS: Sensors, Short wave infrared radiation, Indium gallium arsenide, Infrared radiation, Photodetectors, Avalanche photodetectors, Infrared detectors, Infrared sensors, Infrared photography, Long wavelength infrared

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Proceedings Article | 25 October 2013 Paper

InGaAs infrared detector development for SWIR imaging applications

F. Rutz, P. Kleinow, R. Aidam, W. Bronner, L. Kirste, M. Walther

Proceedings Volume 8896, 88960C (2013) https://doi.org/10.1117/12.2026879

KEYWORDS: Avalanche photodetectors, Indium gallium arsenide, Short wave infrared radiation, Sensors, Photodetectors, Detector development, Cameras, Diodes, Staring arrays, Infrared detectors

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Proceedings Article | 11 June 2013 Paper

Defects and noise in Type-II superlattice infrared detectors

Martin Walther, Andreas Wörl, Volker Daumer, Robert Rehm, Lutz Kirste, Frank Rutz, Johannes Schmitz

Proceedings Volume 8704, 87040U (2013) https://doi.org/10.1117/12.2015926

KEYWORDS: Diodes, Gallium antimonide, Etching, Palladium, Mid-IR, Data modeling, Superlattices, Semiconducting wafers, Photodiodes, Wet etching

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Proceedings Article | 21 May 2011 Paper

The development of 3[sup]rd[/sup] generation IR detectors at AIM

J. Ziegler, D. Eich, M. Mahlein, T. Schallenberg, R. Scheibner, J. Wendler, J. Wenisch, R. Wollrab, V. Daumer, R. Rehm, F. Rutz, M. Walther

Proceedings Volume 8012, 801237 (2011) https://doi.org/10.1117/12.883888

KEYWORDS: Sensors, Long wavelength infrared, Mid-IR, Staring arrays, Diodes, Medium wave, Readout integrated circuits, Gallium arsenide, Etching, Infrared detectors

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Proceedings Article | 21 May 2011 Paper

Current developments for type-II superlattice imaging systems

Frank Rutz, Robert Rehm, Martin Walther, Lutz Kirste, Michael Masur, Andreas Wörl, Johannes Schmitz, Matthias Wauro, Jasmin Niemasz, Ralf Scheibner, Johann Ziegler

Proceedings Volume 8012, 80120U (2011) https://doi.org/10.1117/12.883786

KEYWORDS: Gallium antimonide, Semiconducting wafers, Sensors, Stereolithography, Superlattices, Detector arrays, Thermography, Etching, Staring arrays, Mid-IR

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Proceedings Article | 24 January 2011 Paper

Defect density reduction in InAs/GaSb type II superlattice focal plane array infrared detectors

Martin Walther, Robert Rehm, Johannes Schmitz, Jasmin Niemasz, Frank Rutz, Andreas Wörl, Lutz Kirste, Ralf Scheibner, Joachim Wendler, Johann Ziegler

Proceedings Volume 7945, 79451N (2011) https://doi.org/10.1117/12.875159

KEYWORDS: Gallium antimonide, Sensors, Stereolithography, Semiconducting wafers, Infrared detectors, Staring arrays, Etching, Superlattices, Imaging systems, Cameras

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Proceedings Article | 4 May 2010 Paper

Type-II superlattices: the Fraunhofer perspective

Robert Rehm, Martin Walther, Johannes Schmitz, Frank Rutz, Andreas Wörl, Ralf Scheibner, Johann Ziegler

Proceedings Volume 7660, 76601G (2010) https://doi.org/10.1117/12.850172

KEYWORDS: Diodes, Gallium antimonide, Stereolithography, Sensors, Photodiodes, Detector arrays, Semiconducting wafers, Superlattices, Imaging systems, Infrared imaging

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Proceedings Article | 23 January 2010 Paper

InAs/GaSb type II superlattices for advanced 2nd and 3rd generation detectors

Martin Walther, Robert Rehm, Johannes Schmitz, Joachim Fleissner, Frank Rutz, Lutz Kirste, Ralf Scheibner, Joachim Wendler, Johann Ziegler

Proceedings Volume 7608, 76081Z (2010) https://doi.org/10.1117/12.842065

KEYWORDS: Gallium antimonide, Stereolithography, Sensors, Imaging systems, Superlattices, Thermography, Indium arsenide, Mid-IR, Cameras, Infrared detectors

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Proceedings Article | 24 September 2009 Paper

Advanced III/V quantum-structure devices for high performance infrared focal plane arrays

Robert Rehm, Martin Walther, Johannes Schmitz, Frank Rutz, Joachim Fleissner, Ralf Scheibner, Johann Ziegler

Proceedings Volume 7481, 74810E (2009) https://doi.org/10.1117/12.835153

KEYWORDS: Quantum well infrared photodetectors, Sensors, Stereolithography, Readout integrated circuits, Staring arrays, Superlattices, Infrared imaging, Infrared radiation, Silicon, Imaging systems

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Proceedings Article | 7 May 2009 Paper

InAs/GaSb superlattice focal plane array infrared detectors: manufacturing aspects

Frank Rutz, Robert Rehm, Johannes Schmitz, Joachim Fleissner, Martin Walther, Ralf Scheibner, Johann Ziegler

Proceedings Volume 7298, 72981R (2009) https://doi.org/10.1117/12.819090

KEYWORDS: Stereolithography, Sensors, Semiconducting wafers, Superlattices, Gallium antimonide, Cameras, Etching, Mid-IR, Staring arrays, Imaging systems

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Proceedings Article | 26 January 2009 Paper

Status of mid-infrared superlattice technology in Germany

Robert Rehm, Martin Walther, Johannes Schmitz, Frank Rutz, Joachim Fleissner, Ralf Scheibner, Johann Ziegler

Proceedings Volume 7222, 72220T (2009) https://doi.org/10.1117/12.809045

KEYWORDS: Superlattices, Sensors, Mid-IR, Stereolithography, Quantum efficiency, Semiconducting wafers, Cameras, Photodiodes, Absorption, Diodes

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Proceedings Article | 15 April 2008 Paper

Antimony-based superlattices for high-performance infrared imagers

Martin Walther, Robert Rehm, Johannes Schmitz, Frank Rutz, Joachim Fleissner, Johann Ziegler

Proceedings Volume 6940, 69400A (2008) https://doi.org/10.1117/12.777515

KEYWORDS: Stereolithography, Sensors, Diodes, Imaging systems, Mid-IR, Superlattices, Thermography, Cameras, Quantum efficiency, Gallium antimonide

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Proceedings Article | 8 February 2008 Paper

Applications of terahertz spectroscopy in the plastics industry

S. Wietzke, F. Rutz, C. Jördens, N. Krumbholz, N. Vieweg, C. Jansen, R. Wilk, M. Koch

Proceedings Volume 6840, 68400V (2008) https://doi.org/10.1117/12.757547

KEYWORDS: Terahertz radiation, Polymers, Spectroscopy, Refractive index, Nondestructive evaluation, Terahertz spectroscopy, Reflectors, Process control, Lenses, Control systems

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Proceedings Article | 19 May 2006 Paper

Mail inspection using THz imaging: a comparison of three different systems

K. Baaske, M. Salhi, F. Rutz, T. Hasek, R. Wilk, H. Richter, M. Koch

Proceedings Volume 6212, 62120U (2006) https://doi.org/10.1117/12.665238

KEYWORDS: Terahertz radiation, Imaging systems, Antennas, Absorption, Microwave radiation, Gas lasers, Inspection, Spectroscopy, Metals, Laser systems engineering

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Proceedings Article | 19 April 2006 Paper

Improved dielectric mirrors for the THz frequency range

F. Rutz, N. Krumbholz, L. Micele, G. de Portu, D. Mittleman, M. Koch

Proceedings Volume 6194, 61940K (2006) https://doi.org/10.1117/12.661610

KEYWORDS: Terahertz radiation, Mirrors, Dielectric mirrors, Refractive index, Silicon, Ceramics, Microresonators, Dielectrics, Antennas, Absorption

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Proceedings Article | 25 March 2005 Paper

Experimental and theoretical study of the THz absorption spectra of selected tripeptides

Frank Rutz, R. Wilk, T. Kleine-Ostmann, J. Grunenberg, Martin Koch

Proceedings Volume 5727, (2005) https://doi.org/10.1117/12.590532

KEYWORDS: Terahertz radiation, Absorption, Molecules, Spectroscopy, Terahertz spectroscopy, Hydrogen, Ions, Proteins, Magnesium, Chemical species

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Proceedings Article | 25 March 2005 Paper

Quality control of polymeric compounds using terahertz imaging

Frank Rutz, Martin Koch, Shilpa Khare, Martin Moneke

Proceedings Volume 5727, (2005) https://doi.org/10.1117/12.590301

KEYWORDS: Terahertz radiation, Polymers, Particles, Absorption, Silver, Transmission electron microscopy, Terahertz spectroscopy, Spectroscopy, Antennas, Photography

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