Prof. Frédéric Chausse
at Institut Pascal
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 124962P (2023) https://doi.org/10.1117/12.2657908
KEYWORDS: Edge detection, Metrology, Scanning electron microscopy, Data modeling, Transmission electron microscopy, Deep learning, Semiconductors, Critical dimension metrology

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