Mr. Fumiki Kato Profile

Fumiki Kato

at Ritsumeikan Univ

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Author

Publications (4)

Proceedings Article | 30 April 2009 Paper

Magnetic field assisted finishing of ultra-lightweight and high-resolution MEMS x-ray micro-pore optics

Raul Riveros, Hitomi Yamaguchi, Ikuyuki Mitsuishi, Utako Takagi, Yuichiro Ezoe, Fumiki Kato, Susumu Sugiyama, Noriko Yamasaki, Kazuhisa Mitsuda

Proceedings Volume 7360, 736013 (2009) https://doi.org/10.1117/12.823961

KEYWORDS: Polishing, X-rays, Mirrors, Magnetism, X-ray optics, Surface finishing, Reflection, Microelectromechanical systems, Nickel, Abrasives

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Proceedings Article | 30 April 2009 Paper

Novel ultra-lightweight and high-resolution MEMS x-ray optics

Ikuyuki Mitsuishi, Yuichiro Ezoe, Utako Takagi, Makoto Mita, Raul Riveros, Hitomi Yamaguchi, Fumiki Kato, Susumu Sugiyama, Kouzou Fujiwara, Kohei Morishita, Kazuo Nakajima, Shinya Fujihira, Yoshiaki Kanamori, Noriko Yamasaki, Kazuhisa Mitsuda, Ryutaro Maeda

Proceedings Volume 7360, 73600C (2009) https://doi.org/10.1117/12.823933

KEYWORDS: X-rays, Mirrors, Silicon, X-ray optics, Microelectromechanical systems, X-ray technology, Nickel, Semiconducting wafers, Hydrogen, Wafer-level optics

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Proceedings Article | 4 January 2006 Paper

Fabrication of submicron three-dimensional structure by plane-pattern to the cross-section transfer method using synchrotron radiation lithography

Fumiki Kato, Shinya Fujinawa, Makoto Tsudo, Susumu Sugiyama

Proceedings Volume 6037, 60371R (2006) https://doi.org/10.1117/12.638600

KEYWORDS: Photomasks, X-rays, Near field diffraction, Diffraction, X-ray lithography, Lithography, Synchrotron radiation, X-ray diffraction, Scanning probe microscopy, Submicron lithography

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Proceedings Article | 4 January 2006 Paper

Development of fabrication process for shape-control of three-dimensional submicron structure by synchrotron radiation lithography

S. Fujinawa, F. Kato, S. Sugiyama

Proceedings Volume 6037, 603717 (2006) https://doi.org/10.1117/12.638569

KEYWORDS: Polymethylmethacrylate, X-rays, Diffraction, Lithography, Synchrotron radiation, Fabrication, Diffraction gratings, Optical components, Submicron lithography, Tantalum

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