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Dr. Gene Siegel
at Air Force Research Lab
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Author
Publications (1)
Proceedings Article | 9 March 2020 Presentation
Scalable growth of atomically thin BN: an ultra-wide band gap material (Conference Presentation)
Michael Snure, Gene Siegel, Stefan Badescu
Proceedings Volume 11302, 113020K (2020) https://doi.org/10.1117/12.2537408
KEYWORDS: Metals, Process control, Chemistry, Dielectrics, Semiconductors, Deep ultraviolet, Vapor phase epitaxy, Sapphire, Transition metals, Control systems
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