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Geunchang Choi
at Seoul National Univ
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Publications (1)
SPIE Journal Paper | 3 May 2018 Open Access
Control of optical nanometer gap shapes made via standard lithography using atomic layer deposition
Jiyeah Rhie, Dukhyung Lee, Young-Mi Bahk, Jeeyoon Jeong, Geunchang Choi, Youjin Lee, Sunghwan Kim, Seunghun Hong, Dai-Sik Kim
JM3, Vol. 17, Issue 02, 023504, (May 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.2.023504
KEYWORDS: Photoresist materials, Etching, Scanning electron microscopy, Metals, Atomic layer deposition, Ion beams, Chromium, Photomasks, Gold, Lithography
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