Mr. Gi-Sung Lee Profile

Gi-Sung Lee

Senior Research Engineer at National Nanofab Ctr

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Publications (2)

Proceedings Article | 12 November 2024 Poster + Paper

Development of a porous patterned membrane with a large field size for EUV pellicles

Tae Joong Ha, Gi-sung Lee, Haneul Kim, Jungyeon Kim, Jinho Ahn

Proceedings Volume 13215, 132150V (2024) https://doi.org/10.1117/12.3033641

KEYWORDS: Porosity, Etching, Silicon, Pellicles, Extreme ultraviolet, Transmittance, Silicon nitride, Dry etching, Surface roughness, Semiconductors, Wet etching

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Proceedings Article | 10 April 2024 Poster + Paper

A novel solution for next-generation EUV pellicle: breathable membrane with increased transmittance

Haneul Kim, Jungyeon Kim, Young-Woo Kang, Min-woo Kim, Tae Joong Ha, Gi Sung Lee, Hye-Keun Oh, Jinho Ahn

Proceedings Volume 12953, 129531B (2024) https://doi.org/10.1117/12.3011123

KEYWORDS: Pellicles, Porosity, Transmittance, Extreme ultraviolet, Simulations, Film thickness, Lithography, Extreme ultraviolet lithography, Finite element methods, Critical dimension metrology

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