Prof. Guoqiang Yang
at Institute of Chemistry
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 11 July 2024
Xiaodong Yuan, Jinping Chen, Tianjun Yu, Yi Zeng, Xudong Guo, Shuangqing Wang, Rui Hu, Peng Tian, Michaela Vockenhuber, Dimitrios Kazazis, Yasin Ekinci, Jun Zhao, Yanqing Wu, Guoqiang Yang, Yi Li
JM3, Vol. 23, Issue 03, 034601, (July 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.3.034601
KEYWORDS: Extreme ultraviolet lithography, Electron beam lithography, Lithography, Line edge roughness, Film thickness, Etching, Scanning electron microscopy, Solubility, Line width roughness, Molecules

SPIE Journal Paper | 2 June 2022
Zhihao Wang, Jinping Chen, Tianjun Yu, Yi Zeng, Guoqiang Yang, Timothée Allenet, Michaela Vockenhuber, Yasin Ekinci, Yi Li
JM3, Vol. 21, Issue 04, 041403, (June 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.041403
KEYWORDS: Photoresist materials, Electron beam lithography, Extreme ultraviolet lithography, Photoresist developing, Lithography, Electron beams, Polymers, Scanning electron microscopy, Line edge roughness, Polymethylmethacrylate

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