Ms. Haeng-Leem Jeon Profile

Haeng-Leem Jeon

at Dongbu HiTek Co Ltd

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Publications (2)

Proceedings Article | 5 April 2007 Paper

The optimization of photoresist profile for sub-90nm technology

Haengleem Jeon, Cheonman Shim, Jiho Hong, Jaewon Han, Keeho Kim

Proceedings Volume 6518, 65184K (2007) https://doi.org/10.1117/12.711965

KEYWORDS: Photoresist materials, Line edge roughness, Temperature metrology, Etching, Optical lithography, Scanning electron microscopy, Diffusion, Lithography, Reflectivity, Process control

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Proceedings Article | 20 March 2006 Paper

Flare effect of different shape of illumination apertures in 193-nm optical lithography system

Young-Je Yun, Ju-Hyung Moon, Haeng-Leem Jeon, Jea-Hee Kim, Keeho Kim

Proceedings Volume 6154, 615435 (2006) https://doi.org/10.1117/12.656999

KEYWORDS: Light scattering, Diffraction, Photomasks, Lithographic illumination, Optical lithography, Lithography, Critical dimension metrology, Light, Reflection, Photoresist processing

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