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Hideki Tsutsumi
at Panasonic Factory Solutions Co Ltd
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Publications (1)
Proceedings Article | 10 February 2005 Paper
Ultrahighly accurate 3D profilometer
Hideki Tsutsumi, Keiichi Yoshizumi, Hiroyuki Takeuchi
Proceedings Volume 5638, (2005) https://doi.org/10.1117/12.573774
KEYWORDS: Profilometers, Aspheric lenses, Mirrors, Digital video discs, 3D metrology, Manufacturing, Optical communications, Nonimpact printing, Semiconducting wafers, Glasses
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