Ms. Hiroko Minami Profile

Hiroko Minami

at Litho Tech Japan Co Ltd

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 23 March 2020 Paper

Study of lithographic characteristics due to differences in novolac resin structure

Atsushi Sekiguchi, Hatsuyuki Tanaka, Hiroko Minami, Yoko Matsumoto, Makoto Hanabata

Proceedings Volume 11326, 113261S (2020) https://doi.org/10.1117/12.2550317

KEYWORDS: Picture Archiving and Communication System, Molecules, Scanning electron microscopy, Photoresist developing, Hydrogen, Molecular interactions

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Proceedings Article | 25 March 2019 Paper

Study of outgassing from the ArF CA chemically amplified resist ArF (193 nm) exposure

Hiroko Minami, Yoko Matsumoto, Atsushi Sekiguchi, Tomoki Nishino

Proceedings Volume 10960, 1096021 (2019) https://doi.org/10.1117/12.2513398

KEYWORDS: Ions, Manufacturing, Silicon, Chemical analysis, Chromatography, Polymers, Liquids, Chemically amplified resists, Scanners, Photography

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Proceedings Article | 3 October 2018 Presentation + Paper

In-situ measurement of outgassing generated from EUV metal oxide nanoparticles resist during electron irradiation

Y. Minami, S. Takahashi, H. Minami, Y. Matsumoto, M. Kadoi, A. Sekiguchi, T. Watanabe

Proceedings Volume 10809, 108091W (2018) https://doi.org/10.1117/12.2503255

KEYWORDS: Metals, Extreme ultraviolet, Oxides, Contamination, Nanoparticles, Extreme ultraviolet lithography, Mass spectrometry, Particles

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Proceedings Article | 5 September 2018 Paper

Study of the anti-fouling polymer sheet which used biomimetics technique

Atsushi Sekiguchi, Yoko Matsumoto, Hiroko Minami, Tomoki Nishino, Hiroshi Tanigawa, Kazuki Tokumaru, Fujio Tsumori

Proceedings Volume 10728, 107280L (2018) https://doi.org/10.1117/12.2319698

KEYWORDS: Polymers, Biomimetics, Liquids, Nanoparticles, Scanning electron microscopy, Silicon, Nanotechnology, Manufacturing, Ultraviolet radiation, Printing

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