Dr. Hiroshi Itoh
Senior Researcher at AIST
SPIE Involvement:
Author
Publications (5)

SPIE Journal Paper | 24 June 2024
Tetsuya Hoshino, Sadao Aoki, Masahide Itoh, Hiroshi Itoh, Takato Inoue, Satoshi Matsuyama
OE, Vol. 63, Issue 11, 111804, (June 2024) https://doi.org/10.1117/12.10.1117/1.OE.63.11.111804
KEYWORDS: Hard x-rays, Diffraction, Specular reflections, Light scattering, Scattering, Scatterometry, Grazing incidence, Silicon, Signal to noise ratio, Mie scattering

Proceedings Article | 8 September 2014 Paper
Proceedings Volume 9173, 917305 (2014) https://doi.org/10.1117/12.2062759
KEYWORDS: Atomic force microscopy, Transmission electron microscopy, Calibration, System on a chip, Metrology, Atomic force microscope, Silicon, Photomicroscopy, Semiconductors, Critical dimension metrology

SPIE Journal Paper | 12 March 2012
Masahiro Watanabe, Shuichi Baba, Toshihiko Nakata, Takafumi Morimoto, Satoshi Sekino, Hiroshi Itoh
JM3, Vol. 11, Issue 1, 011009, (March 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.1.011009
KEYWORDS: Atomic force microscope, Carbon nanotubes, Atomic force microscopy, Silicon, Calibration, Cadmium, Sensors, Signal detection, Eye, Distortion

Proceedings Article | 20 April 2011 Paper
Hiroshi Itoh, Chunmei Wang, Hideki Takagi
Proceedings Volume 7971, 79711A (2011) https://doi.org/10.1117/12.879774
KEYWORDS: Atomic force microscopy, Silicon, Silica, Image analysis, Silicon films, Semiconducting wafers, Transmission electron microscopy, Convolution, Oxides, Image transmission

Proceedings Article | 24 March 2009 Paper
Masahiro Watanabe, Shuichi Baba, Toshihiko Nakata, Hiroshi Itoh, Takafumi Morimoto, Satoshi Sekino
Proceedings Volume 7272, 72721P (2009) https://doi.org/10.1117/12.813375
KEYWORDS: Deconvolution, Atomic force microscopy, Critical dimension metrology, Signal detection, Cerium, Sensors, Silicon, Eye, Calibration, Distortion

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