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Hongxia Li
at Shanghai Institute of Optics and Fine Mechanics
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Publications (1)
Proceedings Article | 10 February 2005 Paper
Research on novel beam homogenizer for excimer laser and evaluating norm of beam uniformity
Hong-xia Li, Qi-hong Lou, Zhenhuan Ye, J. Dong, Y. Wei, L. Ling
Proceedings Volume 5638, (2005) https://doi.org/10.1117/12.575934
KEYWORDS: Prisms, Excimer lasers, Beam homogenizers, Beam analyzers, Light sources, Laser cutting, Excimers, Neon, Beam splitters, Pulsed laser operation
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