Mr. Hung-Ming Lin Profile

Hung-Ming Lin

Deputy Director at Powerchip Semiconductor Manufacturing Corp

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Publications (2)

Proceedings Article | 11 April 2008 Paper

The rapid introduction of immersion lithography for NAND flash: challenges and experience

Chan-Tsun Wu, Hung Ming Lin, Wei-Ming Wu, Meng-Hsun Chan, Benjamin Lin, Kuan-Heng Lin, Andrew Hazelton, Toshio Ohhashi, Katsushi Nakano, Yasuhiro Iriuchijima, Chunhsin Lee, Long Hung

Proceedings Volume 6924, 69241A (2008) https://doi.org/10.1117/12.772448

KEYWORDS: Photoresist materials, Semiconducting wafers, Particles, Scanners, Line width roughness, Immersion lithography, Lithography, Critical dimension metrology, Coating, Defect inspection

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Proceedings Article | 24 March 2008 Paper

Improve overlay control and scanner utilization through high order corrections

Hung Ming Lin, Benjamin Lin, James Wu, Smixer Chiu, Chin-Chou Kevin Huang, James Manka, Desmond Goh, Healthy Huang, David Tien

Proceedings Volume 6922, 69222R (2008) https://doi.org/10.1117/12.772118

KEYWORDS: Semiconducting wafers, Scanners, Overlay metrology, Control systems, Manufacturing, Metrology, Data modeling, Process control, Semiconductors, Optical alignment

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