Dr. Ichiki Takemoto
Senior Research Associate at Sumitomo Chemical Co Ltd
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 26 March 2008 Paper
Ichiki Takemoto, Nobuo Ando, Kunishige Edamatsu, Youngjoon Lee, Masayuki Takashima, Hiroyuki Yokoyama
Proceedings Volume 6923, 69231N (2008) https://doi.org/10.1117/12.771880
KEYWORDS: Line edge roughness, Lithography, Extreme ultraviolet lithography, Ions, Extreme ultraviolet, Polymers, Photoresist materials, Chemical analysis, Molecules, Chemically amplified resists

Proceedings Article | 3 April 2007 Paper
Ichiki Takemoto, Nobuo Ando, Kunishige Edamatsu, Yusuke Fuji, Koji Kuwana, Kazuhiko Hashimoto, Junji Funase, Hiroyuki Yokoyama
Proceedings Volume 6519, 65191X (2007) https://doi.org/10.1117/12.707525
KEYWORDS: Polymers, Surface properties, Fluorine, Polymer thin films, Thin films, Lithography, Chemical analysis, X-rays, Photoemission spectroscopy, Interfaces

Proceedings Article | 11 April 2006 Paper
Nobuo Ando, Youngjoon Lee, Takayuki Miyagawa, Kunishige Edamatsu, Ichiki Takemoto, Satoshi Yamamoto, Yoshinobu Tsuchida, Keiko Yamamoto, Shinji Konishi, Katsushi Nakano, Fujiwara Tomoharu
Proceedings Volume 6153, 615322 (2006) https://doi.org/10.1117/12.655586
KEYWORDS: Line width roughness, Polymers, Diffusion, Semiconducting wafers, Immersion lithography, Photoresist materials, Lithography, Photoresist developing, Scanners, Molecules

Proceedings Article | 4 May 2005 Paper
Ichiki Takemoto, Youngjoon Lee, Yusuke Fuji, Isao Yoshida, Kazuhiko Hashimoto, Takayuki Miyagawa, Satoshi Yamaguchi, Kenji Takahashi, Shinji Konishi
Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.597135
KEYWORDS: Polymers, Photoresist processing, Glasses, Carbon monoxide, Lithography, Carbon, Chemical species, Line edge roughness, Diffusion, Molecules

Proceedings Article | 11 June 1999 Paper
Yasunori Uetani, Hiroaki Fujishima, Kaoru Araki, Kazuhisa Endo, Ichiki Takemoto
Proceedings Volume 3678, (1999) https://doi.org/10.1117/12.350233
KEYWORDS: Silicon, Standards development, Transmittance, Lithium, Polymerization, Lithography, Head-mounted displays, Analytical research, Dry etching, Resistance

Showing 5 of 6 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top