Mr. Jongha Park Profile

Jongha Park

at Siemens EDA

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Publications (2)

Proceedings Article | 20 November 2024 Poster + Paper

Automatic classification of EUV mask defects inspected using DUV inspection optics

Aravindh Rajiv, Samir Bhamidipati, Mark Pereira, Sankaranarayanan Paninjath, Neha Razdan, Stephen Kim, Jinhyuk Choi, Jonghoon Lim, Sujeong Won, Dongwook Lee, Woojin Kim, Jongha Park

Proceedings Volume 13216, 132162I (2024) https://doi.org/10.1117/12.3034707

KEYWORDS: Inspection, Extreme ultraviolet, Deep ultraviolet, Polarization, Image classification, Image processing

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Proceedings Article | 23 March 2020 Paper

Approaches for full coverage physical design space exploration and analysis by synthetic layout generation

Marwah Shafee, Joe Kwan, Wael El-Manhawy, Aliaa Kabeel, Sarah Risk, Jongha Park, SeungJo Lee, Jin Hee Kim, Mostafa Alaa, Mohamed Bahnasawi, Abdelrahman Abdelrazek, Sherif Hammouda, Kareem Madkour, Nabil Sabry

Proceedings Volume 11328, 1132808 (2020) https://doi.org/10.1117/12.2551916

KEYWORDS: Metals, Product engineering, Monte Carlo methods, Image classification, Library classification systems, Classification systems, Process engineering, Manufacturing

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