Jaewoo Seo
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 March 2018 Paper
Jaewoo Seo, Jinwook Jung, Youngsoo Shin
Proceedings Volume 10588, 105880A (2018) https://doi.org/10.1117/12.2297519
KEYWORDS: Clocks, Logic, Multiplexers, Metals, LCDs, Legal, Standards development, Electrical engineering, Electronics, Circuit switching

Proceedings Article | 28 March 2017 Presentation + Paper
Proceedings Volume 10148, 101480K (2017) https://doi.org/10.1117/12.2258010
KEYWORDS: 193nm lithography, Standards development, Optics manufacturing, Light sources, Manufacturing, Extreme ultraviolet, Microelectromechanical systems, Metals, Lithography, Capacitance

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