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Jan Nathanael
at Fraunhofer-IOF
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Publications (3)
Proceedings Article | 12 July 2023 Open Access Paper
Manufacturing of a highly efficient gold coated echelle grating for NIR on a thick silicon substrate with small straylight and wavefront error
Susann Sadlowski, Thomas Flügel-Paul, François Wildi, Martin Wittig, Tino Benkenstein, Jan Nathanael, Marcus Trost, Peter Munzert, Michael Scheler, Uwe Zeitner
Proceedings Volume 12777, 127773T (2023) https://doi.org/10.1117/12.2690566
KEYWORDS: Echelle gratings, Optical gratings, Silicon, Manufacturing, Diffraction gratings, Diffraction, Crystals, Blazed gratings, Astronomical imaging, Gold
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Proceedings Article | 29 August 2022 Paper
CUBES: prototyping the high efficiency UV transmission grating
Proceedings Volume 12188, 121884Y (2022) https://doi.org/10.1117/12.2628258
KEYWORDS: Diffraction gratings, Diffraction, Polarization, Ultraviolet radiation, Lithography, Electron beam lithography, Scanning electron microscopy, Prototyping, Optical design, Atomic layer deposition
Proceedings Article | 9 September 2019 Presentation
XUV coherence tomography: a novel approach to nanoscale 3D imaging (Conference Presentation)
Martin Wünsche, Silvio Fuchs, Jan Nathanael, Johann Abel, Julius Reinhard, Felix Wiesner, Slawomir Skruszewicz, Christian Rödel, Gerhard Paulus
Proceedings Volume 11112, 111120U (2019) https://doi.org/10.1117/12.2528684
KEYWORDS: Extreme ultraviolet, Tomography, Optical coherence tomography, Coherence (optics), Stereoscopy, Silicon, Visible radiation, Near infrared, Spectral resolution, Light sources
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