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Jochen Herrmann
at Heidelberg Instruments Mikrotechnik GmbH
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Publications (1)
Proceedings Article | 9 April 2024 Poster + Paper
Assessing hybrid polymers as innovative photolithography material allowing advanced high aspect ratio/high resolution patterns for micro-optics and patterned passivation layers
M. Russew, A. Benker, J. Herrmann, T. Oberbiermann, S. Grützner, M. Koch, J. Wolf, A. Voigt, A. Schleunitz, G. Grützner
Proceedings Volume 12956, 129560R (2024) https://doi.org/10.1117/12.3010843
KEYWORDS: Polymers, Advanced patterning, Film thickness, Two photon polymerization, Passivation, Optical lithography, Micro optics, Liquids, Manufacturing, Lithography
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