Glancing-angle–deposited thin films are used to fabricate half-wave plates in a 1-D striped geometry, forming alternating regions of linearly polarized light on a single 100-mm-diam substrate. MgO is selected for fabricating the birefringent films for use in vacuum, based on its formation of isolated columns that avoid potential tensile-stress failure of the porous film. While large-area tests have shown high defect densities for fluences <10 J/cm2 , small-spot laser-damage testing has shown resistance to fluences up to 30 J/cm2 (351-nm, 5-ns pulse). An amorphous silica film is investigated to match the optical thickness in the intermediate regions in an effort to fabricate a polarizationcontrol device to reduce focal-point modulation (“beam smoothing”) in high-intensity laser systems. Ongoing efforts to improve the laser-damage threshold and minimize optical losses caused by scatter are essential to realizing a practical device. Scalability of the process to meter-scale substrates is also explored.
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