In this work, we will introduce the Bessel beam asymmetry control for glass dicing applications. Asymmetrical Bessel beam can be used to form modifications inside the glass with dominant crack propagation direction optimizing the dicing speed and sample separation forces. The Bessel beam asymmetry control will be demonstrated by applying axicon tilt operations and other approaches including the beam shaping with amplitude masks. Further, the Bessel beam dicing process will be compared to conventional processing techniques such as mechanical dicing (score and brake method), diamond saw and water jet cutting.
Optical elements are usually fabricated via conventional well-established processes - milling, grinding and polishing. However, these techniques cannot fully satisfy the growing demand for miniaturized optics with tailored properties. An alternative technology is a laser-based fabrication, including the ultrashort laser ablation and the subsequent CO2 laser polishing steps. Although this technique allows complex surface structuring, the fabricated optics require validation. In this contribution, we present the characterization of the laser-fabricated axicon from fused silica and comparison with the conventional element. We demonstrate that laser-fabricated axicon can generate the high-quality optical Bessel beam with a long non-diffractive length, which could be applied for 1 mm-thick glass intra-volume dicing. Furthermore, we demonstrate that the astigmatic aberrations, introduced via axicon tilt operation, allow generation of the asymmetrical intensity pattern, which could enhance the cleavability of modified glass sheets. The scribing process was optimized by the variation of processing parameters to minimize the force, required to separate modified glass sheets, using the fourpoint bending setup. Furthermore, the quality of the generated beam and volumetric scribing performance was compared to the conventional commercial oblate-tip axicon.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.