Dr. Junjie Wu Profile

Dr. Junjie Wu

at Shanghai Jiao Tong Univ.

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Publications (2)

Proceedings Article | 19 November 2021 Paper

Step structure characterization using a metrological AFM rig based on nano measuring machine

Junjie Wu, Chengjie Fan, Jiasi Wei, Kaixin Sun, Yong Zhou, Yuan Li, Xiaoyu Cai

Proceedings Volume 12059, 120591X (2021) https://doi.org/10.1117/12.2616206

KEYWORDS: Atomic force microscopy, Metrology, Sensors, Calibration, Signal processing, Scanners, Laser stabilization

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Proceedings Article | 31 August 2017 Paper

Design and calibration of a nano dimensional standard

Junjie Wu, Guoqing Ding, Xin Chen, Tao Han, Yuan Li

Proceedings Volume 10354, 1035412 (2017) https://doi.org/10.1117/12.2270987

KEYWORDS: Calibration, Microscopes, Atomic force microscope, Silicon, Optical resolution, Optical microscopes, Metrology, Fourier transforms, Interferometers

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