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Klemens Birnbaum
at Fraunhofer-Institut für Photonische Mikrosysteme IPMS
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Author
Publications (2)
Proceedings Article | 12 March 2024 Poster + Paper
Vectorial micro scanning mirror for fast beam positioning of a compact medical therapy laser
Thilo Sandner, Thomas Graßhoff, Markus Schwarzenberg, Klemens Birnbaum, Tino Pügner, Jan Grahmann
Proceedings Volume 12899, 128990R (2024) https://doi.org/10.1117/12.3007365
KEYWORDS: Microelectromechanical systems, Mirrors, Design, Scanners, Laser therapeutics, Coating, Position sensors, Laser scanners, Semiconducting wafers, Piezoresistivity
Proceedings Article | 15 March 2023 Poster + Paper
2D MEMS vector scanning mirrors for LIDAR, medical imaging, and high laser power applications
Thilo Sandner, Benjamin Mustin, Klemens Birnbaum, Martin Blasl, Thomas Graßhoff, Markus Schwarzenberg, Jan Grahmann
Proceedings Volume 12434, 124340W (2023) https://doi.org/10.1117/12.2668618
KEYWORDS: Electromagnetism, Silicon, Semiconducting wafers
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