Lauren M. Otto
at Univ of Minnesota Twin Cities
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 12 May 2020 Open Access Paper
Lauren Otto, Aeron Hammack, Shaul Aloni, D. Frank Ogletree, Deirdre Olynick, Scott Dhuey, Bethanie Stadler, Adam Schwartzberg
Proceedings Volume 9919, 991918 (2020) https://doi.org/10.1117/12.2573754
KEYWORDS: Atomic layer deposition, Plasmonics, Tin, Nanophotonics, Plasma, Gases

Proceedings Article | 3 October 2016 Presentation + Paper
Lauren Otto, Aeron Hammack, Shaul Aloni, D. Frank Ogletree, Deirdre Olynick, Scott Dhuey, Bethanie J. H. Stadler, Adam Schwartzberg
Proceedings Volume 9919, 99190N (2016) https://doi.org/10.1117/12.2238340
KEYWORDS: Plasmonics, Metals, Atomic layer deposition, Plasma, Spectroscopic ellipsometry, Data modeling, Oxides, Plasma etching, Spectroscopy

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