L. R. Boev
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 31 January 2022 Paper
V. Kalugin, E. Kochurina, L. Boev, S. Anchutin, A. Timoshenkov
Proceedings Volume 12157, 121570G (2022) https://doi.org/10.1117/12.2623136
KEYWORDS: Etching, Silicon, Chemical elements, Anisotropic etching, Oxides, Microelectromechanical systems, Manufacturing, Semiconducting wafers, Sensors, Potassium

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